Genus Probe Card System
The Genus probe card system provides automation of wafer level HBM, MM, TLP, and Latch-up testing on a semi-automatic prober. Genus allows automated connection of up to 50 probe needles to various sources such as pulser, bias, ground, etc...
Genus has been designed to work well with DC and AC signals so it's easy to attach virtually any device which operates in a 50Ω environment, from a pulser to a network analyzer.
All this is achieved while maintaining exceptional value by avoiding the need to create custom probe cards for each application, simply select the daughterboard which provides the functionality you need, plug it in, and start testing.
Genus can work with virtually any pad arrangement or material by using an easily replaceable probe needle core assembly. There is no need to make new probe cards for device or process changes, simply change the needle assembly.
If you have a unique need, a custom daughterboard can be designed for your specific application. The Genus system protects your investment with virtually unlimited extensibility and clever reuse of existing components.
GTS offers Genus integration with our optional Maestro Software which controls the Genus hardware and prober stepping.
Specifications
| Channels |
Up to 25 channels for 4 wire sensing, or 50 single channels.
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| Bandwidth |
1 GHz bandwidth to the DUT on high frequency paths.
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| Leakage |
100 pA from signal line to ground.
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| Maximum Voltage |
1kV pulsed for TLP; 4kV HBM applications
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| Maximum Current |
5A pulsed for TLP, HBM, MM and Latch-up
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| ESD |
Supports HBM, MM, HMM waveforms. |
| Measurements |
Standard, Kelvin and Quasi-Kelvin measurement techniques.
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| Customs |
Custom configurations always available, please inquire.
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25 Pin Genus System
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Daughterboards
Genus daughterboards are intellegent devices which control their own functionality and diagnostics allowing the greatest variety of functionality possible. A microcontroller on each daughterboard communicates to the motherboard so you can guarantee the system is in the proper configuration and operating correctly at all times.
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Bias Daughterboard
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The bias daugtherboard is specifically designed to allow a DC bias supply to be connected from one of two inputs to any needle. |
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Cable Daughterboard
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The cable daughterboard takes all 25 signals and breaks them out to SMA connectors so they can be attached to a matrix or other 50Ω device.
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Ground Daughterboard
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The ground daughterboard will ground any signal path.
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Isolator Daughterboard
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The isolator daughterboard allows a true disconnect of any of the 25 signals at the board. This is useful when something higher on the board stack needs to be disconnected from the test, to reduce parasitics from a cable board and external matrix for example.
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Pulser Daughterboard
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The pulser daughterboard can take an input from one of three SMA connectors and route them through to any one needle. There is also a fourth SMA connector that can be used to daisy-chain multiple pulser boards if one wishes.
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Switch Daughterboard
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The switch daughterboard is designed to vector any number of the signals around a board above it by "switching" it from a main to auxilary path. This is useful if one wishes to isolate the signal from being modified by the board above it.
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