Arcus System Picture

Sample Data

HBM Waveform

HBM Waveform

Arcus Flying Probe HBM System

Arcus is a Flying Probe Human Body Model (HBM) ESD testing system that provides improved flexibility and accuracy for packaged parts, bare die, and wafer level testing.

Arcus Advantages

  • Can test all DUT forms wafer, bare-die, packages
  • Does not require test fixture boards or sockets
  • High stress pulse accuracy
  • Reduced Tester parasitics
  • No tester DUT interactions
  • Can verify testing by measuring voltage and current at the DUT for EVERY pulse
  • Provides DUT information similar to TLP I/V curves with every pulse
  • Leakage and curve tracing for failure detection

Arcus' new ESD technology (patent pending) eliminates problems associated with relay-based testers. Unwanted stresses are not applied to the Device Under Test (DUT) during ESD testing, preventing erroneously low or high failure level indications.

Arcus provides unambiguous, verifiable testing by first eliminating tester parasitics, and then recording the current and voltage waveforms at the DUT for each pulse. This is achieved while reducing costs and allowing testing earlier in the development cycle because there is no need for test fixtures and sockets to be produced, thus eliminating this entire costly process.

Arcus replaces the traditional relay matrix used in HBM testers with an automated mechanical positioning system of probe needles for verifiable 2-pin testing. This allows for testing of DUTs with unlimited numbers of pins on wafer, bare die, bumped die, and packages all with one tool.

As the relay matrix has been removed parasitics are effectively eliminated, the resulting exceptional pulse quality and measurement capabilities combine to allow an I/V curve to be generated from each waveform pulse. This provides TLP like data while also capturing turn-on characteristics with every HBM pulse.

Software

Arcus system control software provides for efficient, intuitive, operation to make all your testing tasks easy.

Arcus Full Package Design Arcus Full Package Execution

Specifications

HBM Waveforms Meets JEDEC and ESDA Standards, no pre-pulse voltage ramp, no after pulse leakage current
DUT Pin Count Unlimited number of pins
Die or Pin Grids Sizes up to 100mm by 100mm
Typical Test Times 2 seconds per pin pair for positive and negative pulses and leakage/curve tracing
Voltage Range 50V to 4kV, 1 volt resolution

The Arcus system includes an oscilloscope, a Windows® PC, curve tracing Keithley SourceMeter®, Suss MicroTec® probe station and motorized probes.

Options

  • MM Waveforms 10V to 400V
  • Kelvin probes for improved voltage measurements
  • Selected Rise Times from 3 to 9 ns, user defined with +/- 1 ns accuracy
  • Prober Size Capabilities various options available up to 300mm
  • Full system automation and data acquisition available